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HUSTIR > College of Engineering > Department of Electronic Engineering > Monograph > Item 310993100/5003

Please use this identifier to cite or link to this item: http://ir.hust.edu.tw/dspace/handle/310993100/5003

Title:	退火效應對於高敏度異質結構紫外光檢測器特性之影響
Authors:	林燕柏;潘逸庭;吳榮華;李卿任
Contributors:	修平科技大學電子工程系
Keywords:	氧化鋅(Zinc Oxide, ZnO)
Date:	2015-12
Issue Date:	2016-05-14T08:07:45Z
Abstract:	"氧化鋅(Zinc Oxide, ZnO)擁有直接寬能隙約(3.436eV)的光電半體材料，具有容易蝕刻、鋅礦資源豐富、製作成本低、無毒、熱穩定與化學穩定性都相當良好等優點。本專題製作的內容是探討氧化鋅薄膜在500o C、600o C、700o C 溫度下，其退火效應對於異質結構光檢測器特性之影響。此次研究使用溶膠凝膠法製作氧化鋅溶液，接著於p-type 的Si 基板與玻璃上，利用旋轉塗佈法，固定旋塗6 層膜厚，再分別以高溫爐500oC、600oC、 700oC 之溫度燒結退火。"
Appears in Collections:	[Department of Electronic Engineering] Monograph

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