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Title: FTO導電基板上成長BiFeO3:Al薄膜之研究
Authors: 蕭興澤
王舜揚
邱銘芳
Contributors: 電子工程系
Keywords: 溶膠凝膠
薄膜
多鐵電
鐵電
磁性
介電性
漏電流
Date: 2022-06
Issue Date: 2022-12-05T02:06:43Z
Abstract: 本論文利用溶膠凝膠(Sol-Gel)法在BFO 摻雜Al在FTO 玻璃基板上,並利用 RTA 快速升溫爐在常壓無通氧及升溫速率50oC/min下,進行熱退火處理溫度450 oC、500 oC、550 oC、600oC,利用XRD、SEM及阻抗分析儀量測BiFe1-xAlxO3 (x=0、0.02、0.04、0.06)薄膜的微結構、鐵電性、介電性等特性。探討不同熱退火處理溫度及不同含量的Al對薄膜的微結構、鐵電性、介電性的影響。
Appears in Collections:[Department of Electronic Engineering] Monograph

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