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Please use this identifier to cite or link to this item: http://ir.hust.edu.tw/dspace/handle/310993100/8114

Title: 溶膠-凝膠法製作氧化鋅摻雜裡薄膜特性之研究
Authors: 阮拓宇
林根德
闕至宸
黃方萍
Contributors: 電子工程系
Keywords: 鍍膜
氧化鋅
RTA
Date: 2023-06
Issue Date: 2023-07-31T05:56:41Z
Abstract: 本研究是利用溶膠-凝膠法(Sol-gel)將氧化鋅摻雜鋰元素(Zn1-xLixO,x=0、0.02、0.04、0.06)晶種層薄膜製作在ITO導電基板上,並使用加熱板(300°C)及快速熱退火熱處理(600°C)比較分析結構特性之影響,使用UV光譜儀量測摻雜在薄膜不同濃度的基板,研究結果得知,在正常情況下,濃度越高穿透率越低,當鋰的濃度過高時反而對於光的穿透率上升,當濃度為2%、4%、6%時,能隙Eg分別為3.056eV、2.920eV、3.067eV。
Appears in Collections:[Department of Electronic Engineering] Monograph

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