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Title: 以新穎之複合法製備鈦酸鍶鋇膜之研究
Authors: 謝旻儒;蔡智遠;何湘婷
Contributors: 化學工程系
Keywords: 鈦酸鍶鋇
Date: 2012-12-21
Issue Date: 2012-07-12T03:12:54Z
Abstract: 本研究延續先前製備鈦酸鋇及鈦酸鍶之研究成果,使用鍍氮化鈦膜矽晶片(TiN/Si)做為基材,於80°C含鍶及鋇之鹼性電解液中,以電化學法進行鈦酸鍶鋇膜之製備,探討電解液濃度、反應電壓及反應時間對鈦酸鍶鋇膜成長之影響。
Appears in Collections:[Department of Energy and Materials Technology] Monograph

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