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Title: BiFO3薄膜在不同成長溫度下披覆於不鏽鋼基板之微結構與漏電流分析
Authors: 吳家銘
徐尉軒
劉冠玄
鄂宗岳
Contributors: 修平科技大學電子工程系
Keywords: 速升溫爐
Date: 2015-12
Issue Date: 2016-05-14T08:06:08Z
Abstract: "本研究以溶膠凝膠法製備BiFeO3 (BFO)多鐵性薄膜,透過旋轉塗
佈法將薄膜分別沉積在不鏽鋼基板(stainless steel)和,並利用紅外線快
速升溫爐(Rapid Thermal Annealing,RTA)進行退火處理。在本研究中
將會加入铈(Ce)來探討其溫度變化對BFO 的特性影響。本實驗中藉
由XRD 量測證實了BFO 薄膜成功的生長在不鏽鋼基板上,經XRD
圖來比較純BFO 和參雜Ce 的變化。因不同的成長溫度對於BiFeO3
薄膜的結構與特性有非常深遠的影響,本研究將BiFeO3 薄膜披覆於
不鏽鋼基板上,且分別在450oC、500oC、550oC 的條件下進行高溫熱
處理,並藉由X-ray 與I-V 量測分析其微結構與漏電流密度特性"
Appears in Collections:[Department of Electronic Engineering] Monograph

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