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Title: 多鐵性BiFeO3薄膜摻雜Er成FTO玻璃基板特性分析
Authors: 李柏諺
賴布岱
林建華
馬志潔
Contributors: 電子工程系
Keywords: 溶膠凝膠法
薄膜
多鐵性
鐵電
介電
漏電流
Date: 2020-06
Issue Date: 2020-12-15T08:00:20Z
Abstract: 本研究以溶膠凝膠法製備BiErFeO3(BEFO) 之多鐵性薄膜,透過旋轉塗佈法將薄膜沉積在FTO玻璃基板上,並且利用RTA快速升溫爐在大氣氛圍下做退火處理。完成不同溫度退火BEFO薄膜製作,利用X光繞射儀(XRD)、阻抗分析儀(HP4284)、 KEITHLEY 2400,探討對晶體結構、漏電流特性、介電性及鐵電性之影響。
Appears in Collections:[Department of Electronic Engineering] Monograph

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