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Title: 氧化鋅摻鉺奈米柱陣列紫外線光感測器特性研究
Authors: 張政郁
劉仁鈞
蔡志揚
林邦駿
Contributors: 電子工程系
Keywords: 溶膠凝膠法
奈米柱陣列
氧化鋅掺鉺
光電特性
水熱法
Date: 2020-06
Issue Date: 2020-12-15T08:07:20Z
Abstract: 本實驗專題是以溶膠-凝膠法利用旋轉塗佈法成長ZnO晶種層薄膜,並用高溫爐在大氣氛圍下做退火處理,水熱法成長氧化鋅掺鉺(Zn1-xErxO , X=0,0.01,0.03,0.05)奈米柱陣列,探討以鉺不同的摻雜量對奈米柱微結構及光電特性影響,尋求最佳及實用性的奈米柱陣列樣品。
Appears in Collections:[Department of Electronic Engineering] Monograph

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