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"G. S. Chen"的相关文件  

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[電子工程系] 期刊論文 2006 Electroless Deposition of Ultrathin Co-B Based Barriers for Cu Metallization Using an Innovative Seeding Technique G. S. Chen; Y. S. Tang; S. T. Chen; J. Yang
[電子工程系] 期刊論文 2004 Characterization of ultra-thin electroless barriers grown by a self-aligned deposition process on silicon-based dielectric films S. T. Chen; G. S. Chen
[電子工程系] 期刊論文 2004 Self-Aligned Deposition process for ultrathin electroless barriers and copper films on low-k dielectric films G. S. Chen; S. T. Chen; R. F. Louh; T. J. Yang; C. K. Lin
[電子工程系] 期刊論文 2003 Plasma passivation of siloxane-based low-k polymeric films: a comparison of single and mixed (O2/N2/H2) gas sources S. T. Chen; G. S. Chen; T. J. Yang
[電子工程系] 期刊論文 2003 The synergistic effect of N2/H2 gases in the plasma passivation of siloxane-based low-k polymer films’ S. T. Chen; G. S. Chen; T. J. Yang; T. C. Chang; W. H. Yang
[電子工程系] 期刊論文 2001 Growth mechanism of sputter deposited Ta and Ta-N thin films induced by an underlying titanium layer and varying nitrogen flow rates G. S. Chen; S. T. Chen; S. C. Huang; H. Y. Lee
[電子工程系] 期刊論文 2000 An optimal quasi-superlattice design to further improve thermal stability of tantalum nitride diffusion barriers G. S. Chen; S. C. Huang; S. T. Chen; T. J. Yang; P. Y. Lee; J. H. Jou; T. C. Lin
[電子工程系] 期刊論文 2000 Diffusion barrier properties of single- and multilayered quasi-amorphous tantalum nitride thin films against copper penetration G. S. Chen; S. T. Chen
[電子工程系] 期刊論文 2000 Evaluation of single- and multilayered amorphous tantalum nitride thin films as diffusion barriers in copper metallization G. S. Chen; S. T. Chen; L. C. Yang; P. Y. Lee
[電子工程系] 期刊論文 1999 Phase formation behavior and diffusion barrier property of reactively sputtered tantalum-based thin films used in semiconductor metallization G. S. Chen; P. Y. Lee; S. T.

 

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