Hsiuping University of Science and Technology Institutional Repository : Items for Author

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Showing 4 items.

Collection	Date	Title	Authors
[電子工程系] 期刊論文	2004	Self-Aligned Deposition process for ultrathin electroless barriers and copper films on low-k dielectric films	G. S. Chen; S. T. Chen; R. F. Louh; T. J. Yang; C. K. Lin
[電子工程系] 期刊論文	2003	Plasma passivation of siloxane-based low-k polymeric films: a comparison of single and mixed (O2/N2/H2) gas sources	S. T. Chen; G. S. Chen; T. J. Yang
[電子工程系] 期刊論文	2003	The synergistic effect of N2/H2 gases in the plasma passivation of siloxane-based low-k polymer films’	S. T. Chen; G. S. Chen; T. J. Yang; T. C. Chang; W. H. Yang
[電子工程系] 期刊論文	2000	An optimal quasi-superlattice design to further improve thermal stability of tantalum nitride diffusion barriers	G. S. Chen; S. C. Huang; S. T. Chen; T. J. Yang; P. Y. Lee; J. H. Jou; T. C. Lin